Invention Grant
- Patent Title: Apparatus and method for generating a non-thermal atmospheric pressure plasma
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Application No.: US16084192Application Date: 2017-01-25
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Publication No.: US11076475B2Publication Date: 2021-07-27
- Inventor: Michael Weilguni , Pavol Kudela
- Applicant: TDK Electronics AG
- Applicant Address: DE Munich
- Assignee: TDK Electronics AG
- Current Assignee: TDK Electronics AG
- Current Assignee Address: DE Munich
- Agency: Slater Matsil, LLP
- Priority: DE102016104490.3 20160311
- International Application: PCT/EP2017/051559 WO 20170125
- International Announcement: WO2017/153084 WO 20170914
- Main IPC: H05H1/24
- IPC: H05H1/24 ; H01L41/04 ; H01L41/107

Abstract:
An apparatus and a method for generating a non-thermal atmospheric pressure plasma are disclosed. In an embodiment, an apparatus for generating a non-thermal atmospheric-pressure plasma includes a first piezoelectric transformer, a second piezoelectric transformer, and a drive circuit configured to apply an input voltage to each of the piezoelectric transformers, and wherein the input voltage applied to the first transformer is phase-shifted by 90° in relation to the input voltage applied to the second transformer.
Public/Granted literature
- US20200187343A1 Apparatus and Method for Generating a Non-Thermal Atmospheric Pressure Plasma Public/Granted day:2020-06-11
Information query
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