Invention Grant
- Patent Title: Haptic actuators fabricated by roll-to-roll processing
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Application No.: US16540217Application Date: 2019-08-14
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Publication No.: US11078071B2Publication Date: 2021-08-03
- Inventor: Stephen Alan Marsh
- Applicant: Encite LLC
- Applicant Address: US MA Burlington
- Assignee: Encite LLC
- Current Assignee: Encite LLC
- Current Assignee Address: US MA Burlington
- Agency: Fish & Richardson P.C.
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/00 ; B81B3/00 ; B81C1/00 ; H01L41/113 ; H01L41/09

Abstract:
Described is a micro-haptic actuator device that can be fabricated with roll-to-roll MEMS processing techniques. The device includes a first body having a first surface and a second, opposing surface, the body has a chamber defined by at least one interior wall, a piston member disposed in the chamber, physically spaced from the at least one interior wall of the chamber, the piston member having a first surface and a second opposing surface. A membrane layer is disposed over and attached to the first surface of the body, with a portion of the membrane attached to the first surface of the piston member. The device also includes a first electrode supported on a second surface the membrane, and a second body that supports a second electrode, with the second body attached to the second surface of the first body.
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