- 专利标题: Cold stage actuation of optical elements including an optical light shield and a lenslet array connected to a cold finger
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申请号: US16250913申请日: 2019-01-17
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公开(公告)号: US11079281B2公开(公告)日: 2021-08-03
- 发明人: Michele Hinnrichs
- 申请人: UVIA GROUP LLC
- 申请人地址: US PR Humacao
- 专利权人: UVIA GROUP LLC
- 当前专利权人: UVIA GROUP LLC
- 当前专利权人地址: US PR Humacao
- 代理商 Felix L. Fischer
- 主分类号: G01J3/02
- IPC分类号: G01J3/02 ; G01J3/18 ; G01J3/28 ; G01J5/06 ; G01J5/08 ; G01J5/10 ; G01J5/60 ; H01L31/024 ; G01J5/00
摘要:
A cold stage actuation system employs an optical assembly having an adapter ring mounted to a flange connected to a cold finger which extends into a Dewar housing. The flange supports a detector array. A resilient cold shield extends from the adapter ring to a lens holder, the lens holder connected to the resilient cold shield distal from the adapter ring. The lens holder supports a lenslet array. An optical light shield extends from the lens holder oppositely from the resilient cold shield to proximate a window in the Dewar housing. A motor is supported within the Dewar housing. An insulating translation arm connects the motor to the optical light shield, whereby operation of the motor induces the insulating translation arm to extend or retract the optical assembly concentric with an optical axis.
公开/授权文献
- US20200232851A1 COLD STAGE ACTUATION OF OPTICAL ELEMENTS 公开/授权日:2020-07-23
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