公开(公告)号：US20200232851A1

公开(公告)日：2020-07-23

申请号：US16250913

申请日：2019-01-17

申请人： UVIA GROUP LLC

发明人： Michele Hinnrichs

IPC分类号： G01J5/06 ,  G01J5/08 ,  G01J5/10 ,  G01J3/02 ,  G01J3/28

摘要： A cold stage actuation system employs an optical assembly having an adapter ring mounted to a flange connected to a cold finger which extends into a dewar. The flange supports a detector array. A resilient cold shield extends from the adapter ring to a lens holder, the lens holder connected to the resilient cold shield distal from the adapter ring. The lens holder supports a lenslet array. An optical light shield extends from the lens holder oppositely from the resilient cold shield to proximate a window in the dewar. A motor is supported within the dewar. An insulating translation arm connects the motor to the optical light shield, whereby operation of the motor induces the insulating translation arm to extend or retract the optical assembly concentric with an optical axis.

公开(公告)号：US11079281B2

公开(公告)日：2021-08-03

申请号：US16250913

申请日：2019-01-17

申请人： UVIA GROUP LLC

发明人： Michele Hinnrichs

IPC分类号： G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J5/06 ,  G01J5/08 ,  G01J5/10 ,  G01J5/60 ,  H01L31/024 ,  G01J5/00

摘要： A cold stage actuation system employs an optical assembly having an adapter ring mounted to a flange connected to a cold finger which extends into a Dewar housing. The flange supports a detector array. A resilient cold shield extends from the adapter ring to a lens holder, the lens holder connected to the resilient cold shield distal from the adapter ring. The lens holder supports a lenslet array. An optical light shield extends from the lens holder oppositely from the resilient cold shield to proximate a window in the Dewar housing. A motor is supported within the Dewar housing. An insulating translation arm connects the motor to the optical light shield, whereby operation of the motor induces the insulating translation arm to extend or retract the optical assembly concentric with an optical axis.