Invention Grant
- Patent Title: Reduction of crystal growth resulting from annealing a conductive material
-
Application No.: US16269309Application Date: 2019-02-06
-
Publication No.: US11081364B2Publication Date: 2021-08-03
- Inventor: Marko Milojevic , John A. Smythe, III
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/10
- IPC: H01L27/10 ; H01L21/321 ; H01L21/3205 ; H01L21/768 ; H01L27/108 ; H01L49/02

Abstract:
Systems, apparatuses, and methods related to reduction of crystal growth resulting from annealing a conductive material are described. An example apparatus includes a conductive material selected to have an electrical resistance that is reduced as a result of annealing. A stabilizing material may be formed over a surface of the conductive material. The stabilizing material may be selected to have properties that include stabilization of the reduced electrical resistance of the conductive material and reduction of a degree of freedom of crystal growth relative to the surface resulting from recrystallization of the conductive material during the annealing.
Public/Granted literature
- US20200251349A1 REDUCTION OF CRYSTAL GROWTH RESULTING FROM ANNEALING A CONDUCTIVE MATERIAL Public/Granted day:2020-08-06
Information query
IPC分类: