Invention Grant
- Patent Title: Chemical deposition raw material including iridium complex and chemical deposition method using the chemical deposition raw material
-
Application No.: US16478417Application Date: 2018-03-05
-
Publication No.: US11084837B2Publication Date: 2021-08-10
- Inventor: Ryosuke Harada , Toshiyuki Shigetomi , Kazuharu Suzuki
- Applicant: TANAKA KIKINZOKU KOGYO K.K.
- Applicant Address: JP Tokyo
- Assignee: TANAKA KIKINZOKU KOGYO K.K.
- Current Assignee: TANAKA KIKINZOKU KOGYO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-059958 20170324
- International Application: PCT/JP2018/008395 WO 20180305
- International Announcement: WO2018/173724 WO 20180927
- Main IPC: C07F15/00
- IPC: C07F15/00 ; C23C16/16

Abstract:
The present invention relates to a chemical deposition raw material for manufacturing an iridium thin film or an iridium compound thin film by a chemical deposition method, including an iridium complex in which cyclopropenyl or a derivative thereof and a carbonyl ligand are coordinated to iridium. The iridium complex that is applied in the present invention enables an iridium thin film to be manufactured even when a reducing gas such as hydrogen is applied. in which R1 to R3, which are substituents of the cyclopropenyl ligand, are each independently hydrogen, or a linear or branched alkyl group with a carbon number of 1 or more and 4 or less.
Information query