- 专利标题： Fluid synthesis monitoring system
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申请号： US16480592申请日： 2018-02-08
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公开(公告)号： US11090587B2公开(公告)日： 2021-08-17
- 发明人: Takashi Nagata
- 申请人： NIKON CORPORATION
- 申请人地址： JP Tokyo
- 专利权人： NIKON CORPORATION
- 当前专利权人： NIKON CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Roeder & Broder LLP
- 代理商 Steven G. Roeder
- 国际申请： PCT/US2018/017482 WO 20180208
- 国际公布： WO2018/148452 WO 20180816
- 主分类号： B01D35/143
- IPC分类号： B01D35/143 ; B01D37/04 ; F15B19/00 ; F15B21/041 ; B24C7/00
摘要：
A system (10) for moving a fluid (12) includes a flow-circuit element (30) and a control system (32) that monitors an operational condition of the flow-circuit element (30). The control system (32) includes a first sensor (82) that monitors a first sensed condition, and a second sensor (84) that monitors a second sensed condition that is different from the first sensed condition. Further, the control system (32) includes a processor (76) that analyzes the first sensed condition and the second sensed condition to monitor the operational condition of the flow-circuit element (30).
公开/授权文献
- US20190388812A1 FLUID SYNTHESIS MONITORING SYSTEM 公开/授权日：2019-12-26
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