Invention Grant
- Patent Title: Resonator coil having an asymmetrical profile
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Application No.: US16734746Application Date: 2020-01-06
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Publication No.: US11094504B2Publication Date: 2021-08-17
- Inventor: Costel Biloiu , Michael Honan , Robert B Vopat , David Blahnik , Charles T. Carlson , Frank Sinclair , Paul Murphy
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED Materials, Inc.
- Current Assignee: APPLIED Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kacvinsky Daisak Bluni PLLC
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/317 ; H01J23/213 ; H01J23/18 ; H01J25/02 ; H01J25/58 ; H01J37/32 ; H01P7/00 ; H01P7/08 ; H01P7/06

Abstract:
Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.
Public/Granted literature
- US20210210307A1 RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE Public/Granted day:2021-07-08
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