Invention Grant
- Patent Title: 3D power device and system
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Application No.: US16726120Application Date: 2019-12-23
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Publication No.: US11094629B2Publication Date: 2021-08-17
- Inventor: Stefaan Decoutere , Steve Stoffels
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18215846 20181224
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/48 ; H01L23/64 ; H01L29/20 ; H01L21/8258 ; H01L27/06 ; H01L23/367 ; H01L23/528
Abstract:
A three-dimensional (3D) power device having a plurality of layers that are stacked on top of each other and insulated from each other by interlayers, the plurality of layers comprising a lower layer comprising electrical and thermal conductors; a group III-Nitride based device layer formed above the lower layer, the group III-Nitride based device layer comprising at least one group III-Nitride based power device; a control layer formed above the group III-Nitride based device layer, the control layer comprising at least one control device; and a redistribution layer in between the group III-Nitride based device layer and the control layer, the current redistribution layer comprising a metal pattern being provided for laterally redistributing electrical currents and/or heat.
Information query
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