Invention Grant
- Patent Title: Light modulation element, optical device including the light modulation element, and electronic device including the optical device
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Application No.: US16804442Application Date: 2020-02-28
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Publication No.: US11108213B2Publication Date: 2021-08-31
- Inventor: Duhyun Lee , Muhammad Alam , Ghazaleh Kafaie Shirmanesh , Harry Atwater , Pin Chieh Wu , Ragip Pala
- Applicant: SAMSUNG ELECTRONICS CO., LTD. , CALIFORNIA INSTITUTE OF TECHNOLOGY
- Applicant Address: KR Suwon-si; US CA Pasadena
- Assignee: SAMSUNG ELECTRONICS CO., LTD.,CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.,CALIFORNIA INSTITUTE OF TECHNOLOGY
- Current Assignee Address: KR Suwon-si; US CA Pasadena
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2019-0062593 20190528
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/183 ; H01S5/125 ; H01S5/02 ; H01S5/187 ; H01S5/22

Abstract:
A light modulation element according to example embodiments includes a substrate; a first lower DBR layer on the substrate including a first material layer alternately stacked with a second material layer having a different refractive index from the first material layer; a second lower DBR layer on the first lower DBR layer with a surface area less than the first lower DBR layer and including a third material layer alternately stacked with a fourth material layer having a different refractive index from the third material layer; an active layer on the second lower DBR layer, including a semiconductor material having a multi-quantum well structure and having a refractive index that varies according to an applied voltage; and an upper DBR layer on the active layer including a fifth material layer alternately stacked with a sixth material layer having a different refractive index from the fifth material layer.
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