Invention Grant
- Patent Title: Drive and sense balanced, fully-coupled 3-axis gyroscope
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Application No.: US16138637Application Date: 2018-09-21
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Publication No.: US11118907B2Publication Date: 2021-09-14
- Inventor: Doruk Senkal , Robert Hennessy , Houri Johari-Galle , Joe Seeger
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5783

Abstract:
The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.
Public/Granted literature
- US20200096337A1 DRIVE AND SENSE BALANCED, FULLY-COUPLED 3-AXIS GYROSCOPE Public/Granted day:2020-03-26
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