Invention Grant
- Patent Title: Micro-electro-mechanical micro-manipulation device with piezoelectric driving, movable in plane
-
Application No.: US16265650Application Date: 2019-02-01
-
Publication No.: US11123878B2Publication Date: 2021-09-21
- Inventor: Domenico Giusti , Lorenzo Tentori
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102018000002364 20180202
- Main IPC: B25J15/00
- IPC: B25J15/00 ; B25J7/00 ; B25J9/12 ; B25J9/00 ; B25J15/08

Abstract:
A MEMS manipulation device has first and second manipulation arms carrying respective mutually facing gripping elements. At least the first manipulation arm is formed by a driving arm and by an articulated arm hinged together through an articulation structure. The first driving arm includes a first beam element and a first piezoelectric region on the first beam element. The first articulation structure includes a first connecting element not deformable in the thickness direction, as well as a first hinge structure interposed between the first driving arm, the first articulated arm, and the first connecting element.
Public/Granted literature
- US20190240844A1 MICRO-ELECTRO-MECHANICAL MICRO-MANIPULATION DEVICE WITH PIEZOELECTRIC DRIVING, MOVABLE IN PLANE Public/Granted day:2019-08-08
Information query