Micro-electro-mechanical micro-manipulation device with piezoelectric driving, movable in plane
Abstract:
A MEMS manipulation device has first and second manipulation arms carrying respective mutually facing gripping elements. At least the first manipulation arm is formed by a driving arm and by an articulated arm hinged together through an articulation structure. The first driving arm includes a first beam element and a first piezoelectric region on the first beam element. The first articulation structure includes a first connecting element not deformable in the thickness direction, as well as a first hinge structure interposed between the first driving arm, the first articulated arm, and the first connecting element.
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