Invention Grant
- Patent Title: Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure
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Application No.: US16789503Application Date: 2020-02-13
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Publication No.: US11124412B2Publication Date: 2021-09-21
- Inventor: Joerg Muchow , Rainer Straub , Stefan Pinter
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard A. Messina
- Priority: DE102015213473.3 20150717
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00 ; G02B1/14 ; G02B26/08

Abstract:
A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.
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