Invention Grant
- Patent Title: Transistor structure with overlying gate on polysilicon gate structure and related method
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Application No.: US16788914Application Date: 2020-02-12
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Publication No.: US11127831B2Publication Date: 2021-09-21
- Inventor: Qizhi Liu , Vibhor Jain , John J. Pekarik , Judson R. Holt
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8238 ; H01L29/08 ; H01L29/45 ; H01L27/092 ; H01L29/78 ; H01L29/49

Abstract:
Embodiments of the disclosure provide a transistor structure and methods to form the same. The transistor structure may include an active semiconductor region with a channel region between a first source/drain (S/D) region and a second S/D region. A polysilicon gate structure is above the channel region of the active semiconductor region. An overlying gate is positioned on the polysilicon gate structure. A horizontal width of the overlying gate is greater than a horizontal width of the polysilicon gate structure. The transistor structure includes a gate contact to the overlying gate.
Public/Granted literature
- US20210091200A1 TRANSISTOR STRUCTURE WITH OVERLYING GATE ON POLYSILICON GATE STRUCTURE AND RELATED METHOD Public/Granted day:2021-03-25
Information query
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