Invention Grant
- Patent Title: Temperature monitoring system and method for a substrate heating furnace
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Application No.: US15967348Application Date: 2018-04-30
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Publication No.: US11131504B2Publication Date: 2021-09-28
- Inventor: Xin Xiang , Zhiguang Guo , Benxiang Hou , Yunjie Wang , Fan Yang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing; CN Anhui
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing; CN Anhui
- Agency: McDermott Will and Emery LLP
- Priority: CN201710134519.2 20170308
- Main IPC: F27D21/00
- IPC: F27D21/00 ; G01J5/04 ; G01J5/00 ; G01J5/08 ; G01J5/02
Abstract:
A temperature monitoring system for a substrate heating furnace includes a temperature monitor, and the temperature monitor is located on a prong of a mechanical arm which is configured to fetch and place a substrate. The temperature monitor is configured to monitor the temperature of the substrate which has been heated by the substrate heating furnace and is located on the prong.
Public/Granted literature
- US20180259263A1 TEMPERATURE MONITORING SYSTEM AND METHOD FOR A SUBSTRATE HEATING FURNACE Public/Granted day:2018-09-13
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