Invention Grant
- Patent Title: 3D and flash memory architecture with FeFET
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Application No.: US16989584Application Date: 2020-08-10
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Publication No.: US11133329B2Publication Date: 2021-09-28
- Inventor: Hang-Ting Lue
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Andrew L. Dunlap
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11597 ; H01L27/11587 ; G11C7/18 ; G11C11/22 ; G11C8/14 ; H01L27/1159

Abstract:
A 3D flash memory is provided to includes a gate stack structure comprising a plurality of gate layers electrically insulated from each other, a cylindrical channel pillar vertically extending through each gate layer of the gate stack structure, a first conductive pillar vertically extending through the gate stack structure, the first conductive pillar being located within the cylindrical channel pillar and being electrically connected to the cylindrical channel pillar, and a second conductive pillar extending through the gate stack structure, the second conductive pillar being located within the cylindrical channel pillar and being electrically connected to the cylindrical channel pillar, the first conductive pillar and the second conductive pillar being separated from each other. The 3D flash memory also includes a ferroelectric layer disposed between gate layers of the gate stack structure and the cylindrical channel pillar.
Public/Granted literature
- US20210074726A1 3D AND FLASH MEMORY ARCHITECTURE WITH FEFET Public/Granted day:2021-03-11
Information query
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