- 专利标题: Method for producing sealed optical semiconductor device
-
申请号: US16634808申请日: 2018-08-31
-
公开(公告)号: US11139419B2公开(公告)日: 2021-10-05
- 发明人: Eiji Kitaura , Masaaki Amako , Steven Swier
- 申请人: Dow Corning Toray Co., Ltd. , Dow Silicones Corporation
- 申请人地址: JP Tokyo; US MI Midland
- 专利权人: Dow Corning Toray Co., Ltd.,Dow Silicones Corporation
- 当前专利权人: Dow Corning Toray Co., Ltd.,Dow Silicones Corporation
- 当前专利权人地址: JP Tokyo; US MI Midland
- 代理机构: Howard & Howard Attorneys PLLC
- 优先权: JPJP2017-172928 20170908
- 国际申请: PCT/JP2018/032432 WO 20180831
- 国际公布: WO2019/049794 WO 20190314
- 主分类号: H01L33/52
- IPC分类号: H01L33/52 ; H01L33/56
摘要:
A method for producing a sealed optical semiconductor device makes it possible to seal an optical semiconductor element using a sealing film. The method includes: placing a sealing film on an optical semiconductor element substrate on which an optical semiconductor element is placed within a pressure reduction chamber, and the pressure within the chamber is reduced; heating the film where at least the periphery of the film is thermally fused to the surface of the optical semiconductor element placement substrate; and a step in which the reduction of pressure within the chamber is released and the optical semiconductor element placement substrate is sealed by the film. The temperature T2 of the optical semiconductor element placement substrate when the reduction of pressure within the chamber is released is a temperature at which the film exhibits a tensile strength of 0.02-0.15 MPa and an elongation at break of 150-450%.
公开/授权文献
- US20200373457A1 METHOD FOR PRODUCING SEALED OPTICAL SEMICONDUCTOR DEVICE 公开/授权日:2020-11-26
信息查询
IPC分类: