Invention Grant
- Patent Title: Developing method
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Application No.: US16849818Application Date: 2020-04-15
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Publication No.: US11150558B2Publication Date: 2021-10-19
- Inventor: Yi-Rem Chen , Ming-Shane Lu , Chung-Hao Chang , Jui-Ping Chuang , Li-Kong Turn , Fei-Gwo Tsai
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Maschoff Brennan
- Main IPC: G03F7/30
- IPC: G03F7/30 ; H01L21/67

Abstract:
A developing method is provided. The developing method includes rotating a wafer. The developing method also includes dispensing, through a first nozzle, a developer solution onto the rotated wafer through a first nozzle at a first rotating speed. The developing method further includes dispensing, through a second nozzle, a rinse solution onto the rotated wafer through a second nozzle at a second rotating speed. The second rotating speed is less than the first rotating speed. In addition, the developing method includes simultaneously moving the first nozzle and the second nozzle during either the dispensing of the developer solution or the dispensing of the rinse solution.
Public/Granted literature
- US20200241421A1 DEVELOPING METHOD Public/Granted day:2020-07-30
Information query
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