- 专利标题: Static random-access memory (SRAM) and manufacture thereof
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申请号: US16570610申请日: 2019-09-13
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公开(公告)号: US11152379B2公开(公告)日: 2021-10-19
- 发明人: Yong Li
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- 申请人地址: CN Shanghai; CN Beijing
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人地址: CN Shanghai; CN Beijing
- 代理机构: Innovation Counsel LLP
- 优先权: CN201710355742.X 20170519
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/11 ; H01L21/8238 ; H01L29/423 ; H01L29/49 ; H01L29/786
摘要:
A Static Random-Access Memory (SRAM) device and its manufacturing method are presented, relating to semiconductor techniques. The SRAM device includes: a substrate; a first semiconductor column for Pull-Up (PU) transistors and a second semiconductor column for Pull-Down (PD) transistors, with both the first and the second semiconductor columns on the substrate; a first separation region, and a gate stack structure. The first separation region is between the first and the second semiconductor columns and comprises a first region and a second region, the gate stack structure comprises a gate dielectric layer comprising a first part and a second part; a P-type work function regulation layer comprising a first area and a second area adjacent to each other; a N-type work function regulation layer comprising a third area and a fourth area adjacent to each other; and a gate on both the P-type and N-type work function regulation layers.
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