Invention Grant
- Patent Title: Semiconductor memory device and production method thereof
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Application No.: US16993398Application Date: 2020-08-14
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Publication No.: US11152391B2Publication Date: 2021-10-19
- Inventor: Tadashi Iguchi , Murato Kawai , Toru Matsuda , Hisashi Kato , Megumi Ishiduki
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11565
- IPC: H01L27/11565 ; H01L27/11582 ; G11C16/04 ; H01L23/522 ; H01L27/11575 ; H01L29/792 ; H01L21/764 ; H01L27/11551 ; H01L27/11578 ; H01L27/11556

Abstract:
A method of producing a semiconductor memory device includes, when three directions crossing each other are set to first, second, and third directions, respectively, laminating a plurality of first laminates and a plurality of second laminates on a semiconductor substrate in the third direction. The method further includes forming ends of the plurality of first laminates in shapes of steps extending in the first direction, and forming ends of the plurality of second laminates in shapes of steps extending in both directions of the first direction and the second direction.
Public/Granted literature
- US20200373327A1 SEMICONDUCTOR MEMORY DEVICE AND PRODUCTION METHOD THEREOF Public/Granted day:2020-11-26
Information query
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