Invention Grant
- Patent Title: Metal capacitor
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Application No.: US16784292Application Date: 2020-02-07
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Publication No.: US11152458B2Publication Date: 2021-10-19
- Inventor: Chung-Kuang Chen , Chia-Ching Li , Chien-Fu Huang , Chia-Ming Hu
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522 ; H01G4/232 ; H01L27/06

Abstract:
A metal capacitor provided includes a first metal layer and a second metal layer disposed above a substrate. The first metal layer includes a first electrode sheet and a second electrode sheet, and the second metal layer includes a third electrode sheet and a fourth electrode sheet. The first electrode sheet and the second electrode sheet collectively form a first coplanar capacitor. The third electrode sheet and the fourth electrode sheet collectively form a second coplanar capacitor. At least a portion of the fourth electrode sheet is arranged above the first electrode sheet, and the first electrode sheet and the fourth electrode sheet collectively form a first vertical capacitor. At least a portion of the third electrode sheet is arranged above the second electrode sheet, and the second electrode sheet and the third electrode sheet collectively form a second vertical capacitor.
Public/Granted literature
- US20210249504A1 METAL CAPACITOR Public/Granted day:2021-08-12
Information query
IPC分类: