- 专利标题: Gas sensor and method of using the same
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申请号: US15854901申请日: 2017-12-27
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公开(公告)号: US11156576B2公开(公告)日: 2021-10-26
- 发明人: Naoki Harada , Shintaro Sato , Kenjiro Hayashi , Junichi Yamaguchi
- 申请人: FUJITSU LIMITED
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 代理机构: Kratz, Quintos & Hanson, LLP
- 优先权: JPJP2015-131229 20150630
- 主分类号: G01N27/12
- IPC分类号: G01N27/12 ; G01N27/414 ; G01N33/00
摘要:
A gas sensor includes: a semiconductor layer; a graphene film provided above the semiconductor layer and having at least a portion in contact with gas; and a barrier film between the semiconductor layer and the graphene film.
公开/授权文献
- US20180136157A1 GAS SENSOR AND METHOD OF USING THE SAME 公开/授权日:2018-05-17
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