公开(公告)号：US09929237B2

公开(公告)日：2018-03-27

申请号：US14924084

申请日：2015-10-27

申请人： FUJITSU LIMITED

发明人： Junichi Yamaguchi ,  Shintaro Sato ,  Hiroko Yamada ,  Kazuki Tanaka

IPC分类号： H01L29/16 ,  H01L29/66 ,  H01L29/786 ,  H01L21/02 ,  H01L29/04 ,  H01L29/06 ,  C01B32/182 ,  C01B32/186 ,  H01L23/532

CPC分类号： H01L29/1606 ,  C01B32/182 ,  C01B32/186 ,  C01B2204/06 ,  C01B2204/22 ,  H01L21/0242 ,  H01L21/02491 ,  H01L21/02513 ,  H01L21/02516 ,  H01L21/02527 ,  H01L21/02603 ,  H01L21/0262 ,  H01L21/02645 ,  H01L23/53276 ,  H01L29/04 ,  H01L29/045 ,  H01L29/0665 ,  H01L29/66742 ,  H01L29/78603 ,  H01L29/78684 ,  H01L29/78696 ,  H01L2924/0002 ,  H01L2924/00

摘要： A GNR is a ribbon-shaped graphene film which includes: five or more (for example, five, seven, or nine) six-membered rings of carbon atoms which are bonded and arranged in line in a short side direction; and a complete armchair type edge structure along a long side direction. By such a constitution, without using a transfer method, there are materialized a highly reliable graphene film which has an armchair type edge structure with a uniform width at a desired value and which enables an electric current on-off ratio of 105 or more that is practically sufficient for exhibiting a desired band gap.

公开(公告)号：US20190287800A1

公开(公告)日：2019-09-19

申请号：US16299867

申请日：2019-03-12

申请人： FUJITSU LIMITED

发明人： Junichi Yamaguchi

IPC分类号： H01L21/02 ,  H01L29/06 ,  H01L29/16 ,  H01L29/786 ,  H01L29/88 ,  C23C16/26

摘要： A graphene nanoribbon precursor has a structure that is indicated by a predetermined chemical formula. In the chemical formula (1), n1 is an integer that is greater than or equal to 1 and less than or equal to 6; X, Y, and Z are F, Cl, Br, I, H, OH, SH, SO2H, SO3H, SO2NH2, PO3H2, NO, NO2, NH2, CH3, CHO, COCH3, COOH, CONH2, COCl, CN, CF3, CCl3, CBr3, or CI3; and when desorption temperatures of X, Y and Z from carbon atoms constituting six-membered rings are respectively TX, TY, and TZ, a relationship of TX

公开(公告)号：US11156576B2

公开(公告)日：2021-10-26

申请号：US15854901

申请日：2017-12-27

申请人： FUJITSU LIMITED

发明人： Naoki Harada ,  Shintaro Sato ,  Kenjiro Hayashi ,  Junichi Yamaguchi

IPC分类号： G01N27/12 ,  G01N27/414 ,  G01N33/00

摘要： A gas sensor includes: a semiconductor layer; a graphene film provided above the semiconductor layer and having at least a portion in contact with gas; and a barrier film between the semiconductor layer and the graphene film.

公开(公告)号：US09966472B2

公开(公告)日：2018-05-08

申请号：US15494680

申请日：2017-04-24

申请人： FUJITSU LIMITED

发明人： Junichi Yamaguchi

IPC分类号： H01L21/02 ,  H01L29/786 ,  H01L29/16 ,  H01L21/78

CPC分类号： H01L29/78606 ,  B82Y10/00 ,  H01L21/02381 ,  H01L21/02439 ,  H01L21/02488 ,  H01L21/02491 ,  H01L21/02502 ,  H01L21/02527 ,  H01L21/0262 ,  H01L21/02636 ,  H01L21/02664 ,  H01L21/7806 ,  H01L29/1606 ,  H01L29/42368 ,  H01L29/42376 ,  H01L29/4908 ,  H01L29/517 ,  H01L29/66431 ,  H01L29/66742 ,  H01L29/7781 ,  H01L29/78603 ,  H01L29/78684 ,  H01L29/78696 ,  H01L51/0045 ,  H01L51/0533 ,  H01L51/0558

摘要： A stacked structure includes: an insulating substrate; a graphene film that is formed on the insulating substrate; and a protective film that is formed on the graphene film and is made of a transition metal oxide, which is, for example, Cr2O3. Thereby, at the time of transfer of the graphene, polymeric materials such as a resist are prevented from directly coming into contact with the graphene and nonessential carrier doping on the graphene caused by a polymeric residue of the resist is suppressed.