Invention Grant
- Patent Title: Control method of surface characteristic measuring apparatus
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Application No.: US16439035Application Date: 2019-06-12
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Publication No.: US11175123B2Publication Date: 2021-11-16
- Inventor: Takayuki Ishioka , Minoru Katayama
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JPJP2018-125664 20180630
- Main IPC: G01B5/20
- IPC: G01B5/20

Abstract:
A control method of surface characteristic measuring apparatus relatively displaces by a relative displacement mechanism, detects when the distal end of the stylus contacting the measurable surface, calculates an amount of relative displacement in the Z-axis direction between the measuring device and the measured object required for a measuring arm to be leveled after the distal end of the stylus contacts the measurable surface, calculates a displacement amount generated in the distal end of the stylus in an X-axis direction when the measuring device and the measured object are relatively displaced only by in the Z-axis direction; and levels the measuring arm by relatively displacing only by the measuring device and the measured object in the Z-axis direction by the relative displacement mechanism, and relatively displaces only by the measuring device and the measured object in the X-axis direction by the relative displacement mechanism at the same time.
Public/Granted literature
- US20200003542A1 CONTROL METHOD OF SURFACE CHARACTERISTIC MEASURING APPARATUS Public/Granted day:2020-01-02
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