公开(公告)号：US09091521B2

公开(公告)日：2015-07-28

申请号：US13657198

申请日：2012-10-22

Applicant: MITUTOYO CORPORATION

Inventor： Tatsuki Nakayama ,  Minoru Katayama

IPC: G01B5/28 ,  G01B3/00 ,  G01B7/34

CPC classification number: G01B3/008 ,  G01B5/28 ,  G01B7/34

Abstract: Surface texture measuring apparatus includes a measurement arm table storing mass of an entire measurement arm, an arm length from a supporting point to a stylus, and a horizontal and vertical barycenter of the measurement arm in a horizontal posture for each type of the measurement arm in which a second measurement arm having a different mass is attached; a measurement arm specifier; an inclination angle detector detecting an inclination angle of the detector; and a controller reading out from the measurement arm table the mass, the arm length, the horizontal barycenter, and the vertical barycenter for a specified measurement arm, calculating a difference between a measurement force of the measurement arm in the horizontal posture and a measurement force of the measurement arm in an inclined posture based on the read-out information and the inclination angle detected by the inclination angle detector, and adjusting a measurement force.

Abstract translation: 表面纹理测量装置包括：测量臂表，用于将每个测量臂的每种类型的测量臂以水平姿态存储整个测量臂的质量，从支撑点到触针的臂长度以及测量臂的水平和垂直重心 连接具有不同质量的第二测量臂; 测量臂说明符; 检测器的倾斜角度的倾斜角度检测器; 以及从测量臂表读出用于指定测量臂的质量，臂长，水平重心和垂直重心的控制器，计算测量臂在水平姿势中的测量力与测量力之间的差 基于由倾斜角度检测器检测到的读出信息和倾斜角度，以倾斜姿态测量测量臂，并且调节测量力。

公开(公告)号：US11175123B2

公开(公告)日：2021-11-16

申请号：US16439035

申请日：2019-06-12

Applicant: MITUTOYO CORPORATION

Inventor： Takayuki Ishioka ,  Minoru Katayama

IPC: G01B5/20

Abstract: A control method of surface characteristic measuring apparatus relatively displaces by a relative displacement mechanism, detects when the distal end of the stylus contacting the measurable surface, calculates an amount of relative displacement in the Z-axis direction between the measuring device and the measured object required for a measuring arm to be leveled after the distal end of the stylus contacts the measurable surface, calculates a displacement amount generated in the distal end of the stylus in an X-axis direction when the measuring device and the measured object are relatively displaced only by in the Z-axis direction; and levels the measuring arm by relatively displacing only by the measuring device and the measured object in the Z-axis direction by the relative displacement mechanism, and relatively displaces only by the measuring device and the measured object in the X-axis direction by the relative displacement mechanism at the same time.