Invention Grant
- Patent Title: Passivation of nonlinear optical crystals
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Application No.: US14248045Application Date: 2014-04-08
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Publication No.: US11180866B2Publication Date: 2021-11-23
- Inventor: Yung-Ho Alex Chuang , Vladimir Dribinski
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: C30B33/02
- IPC: C30B33/02 ; C30B7/00 ; C30B9/00 ; G01N21/956 ; C30B29/10 ; C30B29/22 ; G01N21/95 ; G01N21/84 ; G01N21/87

Abstract:
The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.
Public/Granted literature
- US20140305367A1 Passivation of Nonlinear Optical Crystals Public/Granted day:2014-10-16
Information query
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