- 专利标题: Method of enhancing a DLC coated surface for enhanced multipaction resistance
-
申请号: US16103519申请日: 2018-08-14
-
公开(公告)号: US11183390B2公开(公告)日: 2021-11-23
- 发明人: Robert Michael Nichol , Walter John Keller, III , Todd Eric Chornenky
- 申请人: Nokomis, Inc.
- 申请人地址: US PA Charleroi
- 专利权人: Nokomis, Inc.
- 当前专利权人: Nokomis, Inc.
- 当前专利权人地址: US PA Charleroi
- 代理机构: AP Patents
- 代理商 Alexander Pokot
- 主分类号: H01L21/3065
- IPC分类号: H01L21/3065 ; H01L21/02 ; H01J9/12 ; H01J1/32 ; C23C16/27 ; C23C16/02
摘要:
A method for creating an enhanced multipaction resistant diamond-like coating (DLC) coating with lower Secondary Electron Emission (SEE) properties is performed on an initial surface by etching a DLC coating deposited on the surface after deposition and optionally creating interlayers to enhance adhesion mechanical properties between the DLC coating and the initial surface.