- 专利标题: Chip package method and chip package structure
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申请号: US16456392申请日: 2019-06-28
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公开(公告)号: US11183463B2公开(公告)日: 2021-11-23
- 发明人: Kerui Xi , Feng Qin , Jine Liu , Xiaohe Li , Tingting Cui
- 申请人: Shanghai AVIC OPTO Electronics Co., Ltd.
- 申请人地址: CN Shanghai
- 专利权人: Shanghai AVIC OPTO Electronics Co., Ltd.
- 当前专利权人: Shanghai AVIC OPTO Electronics Co., Ltd.
- 当前专利权人地址: CN Shanghai
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201910250625.6 20190329
- 主分类号: H01L23/544
- IPC分类号: H01L23/544 ; H01L21/02 ; H01L21/56 ; H01L21/683 ; H01L23/31 ; H01L23/48
摘要:
Chip package method and chip package structure are provided. The chip package method includes: providing a transparent substrate including a first side and a second side; coating the first side of the transparent substrate with an organic polymer material layer; depositing a protective layer on the organic polymer material layer; forming alignment parts on the protective layer; attaching a plurality of chips including metal pins; forming an encapsulating layer on the protective layer; polishing the encapsulating layer to expose the metal pins; forming a first insulating layer; forming first through holes in the first insulating layer; forming metal parts extending along sidewalls of the first through holes; and irradiating the second side of the transparent substrate by a laser to lift off the transparent substrate. The metal parts are insulated from each other and electrically connected to the metal pins.
公开/授权文献
- US20200312779A1 CHIP PACKAGE METHOD AND CHIP PACKAGE STRUCTURE 公开/授权日:2020-10-01
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