Invention Grant
- Patent Title: Package substrate processing method and protective tape
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Application No.: US16149201Application Date: 2018-10-02
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Publication No.: US11183464B2Publication Date: 2021-11-23
- Inventor: Byeongdeck Jang , Youngsuk Kim
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2017-194993 20171005
- Main IPC: H01L23/552
- IPC: H01L23/552 ; H01L23/31 ; H01L23/498 ; H01L21/56 ; H01L21/683 ; H01L21/78 ; H01L23/00

Abstract:
A package substrate processing method for processing a package substrate in which a plurality of semiconductor chips on a wiring substrate are collectively sealed with a sealing agent is provided. In the package substrate processing method, a protective tape is adhered to the wiring substrate side of the package substrate, the package substrate is divided into a plurality of semiconductor packages, and a shield layer is formed on an upper surface and side surfaces of each package. In this instance, the package substrate is divided in a state in which adhesiveness of an adhesive layer of the protective tape in the periphery of the package substrate is reduced or eliminated, whereby adhesion of a metallic powder scattering at the time of the dividing to the adhesive layer of the protective tape is restrained.
Public/Granted literature
- US20190109094A1 PACKAGE SUBSTRATE PROCESSING METHOD AND PROTECTIVE TAPE Public/Granted day:2019-04-11
Information query
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