Invention Grant
- Patent Title: Cantilever piezoelectric transducer
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Application No.: US16152076Application Date: 2018-10-04
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Publication No.: US11183953B2Publication Date: 2021-11-23
- Inventor: Francesco Procopio , Attilio Frangi
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102015000025255 20150618
- Main IPC: H02N2/18
- IPC: H02N2/18 ; H01L41/113

Abstract:
A piezoelectric transducer includes an anchorage and a beam of semiconductor material extending in cantilever fashion from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis. A piezoelectric layer is on the face of the beam. A cross-section of the beam is perpendicular to the first axis and is asymmetrical and shaped so the beam deformations out of the first plane in response to forces applied to the anchorage and oriented parallel to the first axis.
Public/Granted literature
- US20190044458A1 CANTILEVER PIEZOELECTRIC TRANSDUCER Public/Granted day:2019-02-07
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