- 专利标题: Transport system, transport method, and article manufacturing method
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申请号: US16201753申请日: 2018-11-27
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公开(公告)号: US11185954B2公开(公告)日: 2021-11-30
- 发明人: Takashi Nakamura , Hidetada Narahara , Shinichiro Takahama
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. I.P. Division
- 优先权: JPJP2017-230997 20171130,JPJP2018-207506 20181102
- 主分类号: G06F7/00
- IPC分类号: G06F7/00 ; B23P21/00 ; B23P19/04 ; B65G37/02
摘要:
A transport system includes a transport path having at least two transporting modules, a carriage configured to move on the transport path, a controller provided on each of the two transporting modules and configured to drive the carriage in response to a drive command, and a sensor provided on each of the two transporting modules. The drive command is corrected with a distance between the sensors provided on the two transporting modules.
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