• Patent Title: Magnetic sensor and method of manufacturing magnetic sensor
  • Application No.: US16621332
    Application Date: 2018-04-06
  • Publication No.: US11187762B2
    Publication Date: 2021-11-30
  • Inventor: Daizo Endo
  • Applicant: SHOWA DENKO K.K.
  • Applicant Address: JP Tokyo
  • Assignee: SHOWA DENKO K.K.
  • Current Assignee: SHOWA DENKO K.K.
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JPJP2017-115414 20170612
  • International Application: PCT/JP2018/014689 WO 20180406
  • International Announcement: WO2018/230116 WO 20181220
  • Main IPC: G01R33/06
  • IPC: G01R33/06 G01R33/00
Magnetic sensor and method of manufacturing magnetic sensor
Abstract:
A magnetic sensor 1 is provided with: a thin film magnet 20 configured with a hard magnetic material and having magnetic anisotropy in an in-plane direction; a sensitive part 30 including a sensitive element 31 configured with a soft magnetic material and disposed to face the thin film magnet 30, the sensitive element 31 having a longitudinal direction in which a magnetic flux generated by the thin film magnet 20 passes through and a short direction, having uniaxial magnetic anisotropy in a direction crossing the longitudinal direction, and sensing a change in a magnetic field; and a control layer 102 disposed on a side of the thin film magnet 20 opposite to a side of the thin film magnet 20 on which the sensitive element 31 is provided, the control layer 102 controlling the magnetic anisotropy of the thin film magnet 20 to be directed in the in-plane direction.
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