Invention Grant
- Patent Title: Spectral filter for high-power fiber illumination sources
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Application No.: US15665911Application Date: 2017-08-01
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Publication No.: US11187838B2Publication Date: 2021-11-30
- Inventor: Andrew V. Hill , Ohad Bachar , Avi Abramov , Amnon Manassen
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B5/26
- IPC: G02B5/26 ; F21V8/00 ; G01J1/04 ; G02B5/20 ; G01J3/02 ; G02B6/293 ; G01J1/08 ; G01J3/12

Abstract:
A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.
Public/Granted literature
- US20190033501A1 Spectral Filter for High-Power Fiber Illumination Sources Public/Granted day:2019-01-31
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