A package that includes a substrate, an integrated device coupled to the substrate, and a capacitor structure located between the substrate and the integrated device. The capacitor structure includes a capacitor substrate comprising a first trench, a first electrically conductive layer located in the first trench, a dielectric layer located over the first electrically conductive layer, and a second electrically conductive layer located over the dielectric layer. The first electrically conductive layer over the first trench, the dielectric layer and the second electrically conductive layer are configured as a first capacitor.