- 专利标题: Piezoelectric material, piezoelectric element, vibration wave motor, optical apparatus, and electronic apparatus
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申请号: US16051605申请日: 2018-08-01
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公开(公告)号: US11201279B2公开(公告)日: 2021-12-14
- 发明人: Tomohiro Watanabe , Makoto Kubota , Akira Uebayashi , Kanako Oshima , Tatsuo Furuta
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JPJP2017-149962 20170802,JPJP2018-142935 20180730
- 主分类号: H01L41/18
- IPC分类号: H01L41/18 ; H01L41/09 ; H01L41/047 ; C04B35/468 ; H01L41/187 ; H01L41/083 ; B32B18/00 ; C04B35/634 ; C04B35/626 ; H01L41/43 ; H02N2/10 ; H02N2/16 ; H04N5/225 ; G02B7/10
摘要:
A piezoelectric material which is low in load on the environment, and also satisfies both the requirements of a high piezoelectric constant and a high mechanical quality factor. The piezoelectric material comprises a plurality of crystal grains containing Ba, Ca, Ti, Zr, Mn, and O. An average equivalent circle diameter of the crystal grains is not smaller than 1.0 μm and not larger than 10 μm. The crystal grains include crystal grains A each having a first domain with a width of not smaller than 300 nm and not larger than 800 nm, and crystal grains B each having a second domain with a width of not smaller than 20 nm and not larger than 50 nm.
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