Invention Grant
- Patent Title: Mask plate
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Application No.: US16629580Application Date: 2018-11-14
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Publication No.: US11203808B2Publication Date: 2021-12-21
- Inventor: Haibin Zhu , Weijie Wang , Fengjie Zhang , Bo Jiang
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Fay Sharpe LLP
- Priority: CN201810002735.6 20180102
- International Application: PCT/CN2018/115435 WO 20181114
- International Announcement: WO2019/134446 WO 20190711
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/24 ; H01L51/56 ; B05C21/00 ; H01L51/00

Abstract:
A mask plate includes a plurality of first supporting and shielding strips, and a plurality of second supporting and shielding strips. The second supporting and shielding strips and the first supporting and shielding strips perpendicularly intersect. The first supporting and shielding strips and the second supporting and shielding strips are provided with at least one objective supporting and shielding strip, and an edge of a predetermined surface of the objective supporting and shielding strip parallel to an extending direction of the objective supporting and shielding strip is provided with a thinned area; the thinned area extends in the extending direction of the objective supporting and shielding strip, and has a thickness smaller than a thickness of other areas except the thinned area; and the predetermined surface is a surface of the objective supporting and shielding strip facing a deposition material when a mask evaporation is performed through the mask plate.
Information query
IPC分类: