Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
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Application No.: US16506316Application Date: 2019-07-09
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Publication No.: US11205652B2Publication Date: 2021-12-21
- Inventor: Dongjun Lee , Sang Chul Shin , Bong-Soo Kim , Jiyoung Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce
- Priority: KR10-2018-0168250 20181224
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C5/06 ; H01L21/768 ; H01L23/528

Abstract:
A semicondcutor memory device may include a substrate, a bit line structure extending in one direction on the substrate, the bit line structure including a sidewall, a storage node contact on the sidewall of the bit line structure, first and second spacers between the sidewall of the bit line structure and the storage node contact, the first spacer separated from the second spacer by a space between the first spacer and the second spacer, an interlayer dielectric layer on the bit line structure, the interlayer dielectric layer including a bottom surface, a spacer capping pattern extending downward from the bottom surface of the interlayer dielectric layer toward the space between the first and second spacers, and a landing pad structure penetrating the interlayer dielectric layer, the landing pad structure coupled to the storage node contact.
Information query
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