Invention Grant
- Patent Title: Three-dimensional semiconductor memory device
-
Application No.: US16750176Application Date: 2020-01-23
-
Publication No.: US11211402B2Publication Date: 2021-12-28
- Inventor: Kohji Kanamori , Seo-Goo Kang , Younghwan Son , Kwonsoon Jo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2017-0147522 20171107
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11582 ; H01L27/1157 ; H01L27/11573 ; H01L27/11565 ; H01L27/11575 ; G11C8/14

Abstract:
A three-dimensional semiconductor memory device includes a peripheral logic structure on a semiconductor substrate. A horizontal semiconductor layer is on the peripheral logic structure and includes a cell array region and a connection region. Electrode structures extend in a first direction on the horizontal semiconductor layer and are spaced apart in a second direction intersecting the first direction. A pair of the electrode structures adjacent to each other are symmetrically disposed to define a contact region partially exposing the horizontal semiconductor layer. A through via structure is on the contact region and connects the electrode structures to the peripheral logic structure. Each of the electrode structures includes a plurality of gate insulation regions extending along the first direction on the connection region. The gate insulation regions have different lengths from each other in the first direction.
Public/Granted literature
- US20200161330A1 THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-05-21
Information query
IPC分类: