Invention Grant
- Patent Title: Image sensors and methods of forming the same
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Application No.: US17014269Application Date: 2020-09-08
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Publication No.: US11211420B2Publication Date: 2021-12-28
- Inventor: Yun Ki Lee , Minwook Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0006012 20150113
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/06
Abstract:
An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.
Information query
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