- 专利标题: Piezoelectric MEMS microphone
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申请号: US16988738申请日: 2020-08-10
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公开(公告)号: US11212623B2公开(公告)日: 2021-12-28
- 发明人: Lian Duan , Rui Zhang , Zhiyuan Chen
- 申请人: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- 申请人地址: CN Shenzhen
- 专利权人: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- 当前专利权人: AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD.
- 当前专利权人地址: CN Shenzhen
- 代理机构: W&G Law Group
- 优先权: CN201910760698.X 20190816
- 主分类号: H04R17/02
- IPC分类号: H04R17/02 ; H04R7/06 ; B81B3/00 ; H04R7/18
摘要:
The invention provides a piezoelectric micro-electromechanical systems (MEMS) microphone having a base with a cavity, a piezoelectric diaphragm, and a limit element. The base has a ring base, and a support column. The piezoelectric diaphragm includes diaphragm sheets. Each diaphragm sheet have a fixing end connected with the support column and a free end suspended above the cavity. The limit element includes a limit part arranged apart from the piezoelectric diaphragm to limit the free ends in vibration directions of the diaphragm sheets, and an edge fixing plate connected with the outer edge of the limit part and arranged on the ring base. When the diaphragm sheets greatly deform upwards under impact force, deformation of the diaphragm sheets can be controlled, and the diaphragm sheets are protected to prevent the diaphragm sheets from breaking, thereby improving the stability of the piezoelectric MEMS microphone.
公开/授权文献
- US20210051415A1 Piezoelectric MEMS microphone 公开/授权日:2021-02-18
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