Invention Grant
- Patent Title: Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof
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Application No.: US16885908Application Date: 2020-05-28
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Publication No.: US11214061B2Publication Date: 2022-01-04
- Inventor: Domenico Giusti , Mauro Cattaneo , Carlo Luigi Prelini
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102017000082961 20170720
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/16

Abstract:
The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.
Public/Granted literature
- US20200290355A1 MICROFLUIDIC MEMS DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF Public/Granted day:2020-09-17
Information query
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