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    Method for manufacturing a fluid ejection device and fluid ejection device
    1.
    发明授权
    Method for manufacturing a fluid ejection device and fluid ejection device 有权
    用于制造流体喷射装置和流体喷射装置的方法

    公开(公告)号：US08998388B2

    公开(公告)日：2015-04-07

    申请号：US14253276

    申请日：2014-04-15

    Applicant: STMicroelectronics S.r.l.

    Inventor： Mauro Cattaneo ,  Roberto Campedelli ,  Igor Varisco

    IPC: B41J2/045 ,  B41J2/14 ,  B41J2/16

    CPC classification number: B41J2/045 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2002/1437 ,  Y10T29/49401

    Abstract: A method for manufacturing a fluid ejection device, comprising the steps of: providing a first semiconductor body having a membrane layer and a piezoelectric actuator which extends over the membrane layer; forming a cavity underneath the membrane layer to form a suspended membrane; providing a second semiconductor body; making, in the second semiconductor body, an inlet through hole configured to form a supply channel of the fluid ejection device; providing a third semiconductor body; forming a recess in the third semiconductor body; forming an outlet channel through the third semiconductor body to form an ejection nozzle of the fluid ejection device; coupling the first semiconductor body with the third semiconductor body and the first semiconductor body with the second semiconductor body in such a way that the piezoelectric actuator is completely housed in the first recess, and the second recess forms an internal chamber of the fluid ejection device.

    Abstract translation: 一种制造流体喷射装置的方法，包括以下步骤：提供具有膜层的第一半导体主体和在膜层上延伸的压电致动器; 在膜层下方形成空腔以形成悬浮膜; 提供第二半导体本体; 在所述第二半导体本体中形成入口通孔，所述入口通孔被构造成形成所述流体喷射装置的供应通道; 提供第三半导体体; 在所述第三半导体主体中形成凹部; 形成通过所述第三半导体主体的出口通道以形成所述流体喷射装置的喷嘴; 将第一半导体本体与第三半导体本体和第一半导体本体与第二半导体本体耦合，使得压电致动器完全容纳在第一凹部中，并且第二凹部形成流体喷射装置的内部腔室。

    Manufacturing method for a fluid-ejection device, and fluid-ejection device
    2.
    发明授权
    Manufacturing method for a fluid-ejection device, and fluid-ejection device 有权

    公开(公告)号：US10245834B2

    公开(公告)日：2019-04-02

    申请号：US15812960

    申请日：2017-11-14

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Mauro Cattaneo ,  Carlo Luigi Prelini ,  Lorenzo Colombo ,  Dino Faralli ,  Alessandra Sciutti ,  Lorenzo Tentori

    IPC: B41J2/16 ,  B41J2/135 ,  B41J2/01

    Abstract: A method for manufacturing a device for ejecting a fluid, including producing a nozzle plate including: forming a first nozzle cavity, having a first diameter, in a first semiconductor body; forming a hydrophilic layer at least in part in the first nozzle cavity; forming a structural layer on the hydrophilic layer; etching the structural layer to form a second nozzle cavity aligned to the first nozzle cavity in a fluid-ejection direction and having a second diameter larger than the first diameter; proceeding with etching of the structural layer for removing portions thereof in the first nozzle cavity, to reach the hydrophilic layer and arranged in fluid communication the first and second nozzle cavities; and coupling the nozzle plate with a chamber for containing the fluid.

    Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof
    7.
    发明授权
    Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof 有权

    公开(公告)号：US11214061B2

    公开(公告)日：2022-01-04

    申请号：US16885908

    申请日：2020-05-28

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Domenico Giusti ,  Mauro Cattaneo ,  Carlo Luigi Prelini

    IPC: B41J2/14 ,  B41J2/16

    Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

    Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof
    8.
    发明授权
    Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof 有权

    公开(公告)号：US10703102B2

    公开(公告)日：2020-07-07

    申请号：US16030630

    申请日：2018-07-09

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Domenico Giusti ,  Mauro Cattaneo ,  Carlo Luigi Prelini

    IPC: B41J2/14 ,  B41J2/16

    Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

    Fluid ejection microfluidic device, in particular for ink printing, and manufacturing process thereof
    10.
    发明授权
    Fluid ejection microfluidic device, in particular for ink printing, and manufacturing process thereof 有权

    公开(公告)号：US10946653B2

    公开(公告)日：2021-03-16

    申请号：US16414619

    申请日：2019-05-16

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Domenico Giusti ,  Mauro Cattaneo ,  Donata Asnaghi

    IPC: B41J2/14 ,  B41J2/16

    Abstract: The fluid ejection microfluidic device, has a substrate; a buried cavity within the first substrate; a membrane formed by the first substrate and extending between the buried cavity and a first main surface of the substrate; and an access channel extending through the substrate, laterally and externally to the buried cavity and to the membrane and isolated with respect to the buried cavity. A sealed actuation structure extends over the first main surface of the substrate. A containment layer, of polymeric material, extends over the first main surface of the substrate and forms a fluid containment chamber accommodating the sealed actuation structure. A nozzle body of semiconductor material closes the fluid containment chamber at the top and is traversed by an ejection opening, forming, together with the fluid containment chamber and the access channel, a fluidic path.

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