Invention Grant
- Patent Title: Methods for controlling physical vapor deposition metal film adhesion to substrates and surfaces
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Application No.: US15892172Application Date: 2018-02-08
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Publication No.: US11220735B2Publication Date: 2022-01-11
- Inventor: Akhil Srinivasan , Yifei Wang
- Applicant: MEDTRONIC MINIMED, INC.
- Applicant Address: US CA Northridge
- Assignee: MEDTRONIC MINIMED, INC.
- Current Assignee: MEDTRONIC MINIMED, INC.
- Current Assignee Address: US CA Northridge
- Agency: Gates & Cooper LLP
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/02 ; C23C14/06 ; C23C14/14 ; C23C14/18 ; C23C14/20 ; C23C14/30 ; C23C14/34 ; C23C14/54 ; G01N27/327 ; G01N27/411 ; A61B5/145

Abstract:
A method of depositing of a film on a substrate with controlled adhesion. The method comprises depositing the film including metal, wherein the metal is deposited on the substrate using physical vapor deposition at a pressure that achieves a pre-determined adhesion of the film to the substrate. The pre-determined adhesion allows processing of the film into a device while the film is adhered to the substrate but also allows removal of the device from the substrate.
Public/Granted literature
- US20190242010A1 METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESION TO SUBSTRATES AND SURFACES Public/Granted day:2019-08-08
Information query
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