Invention Grant
- Patent Title: Particle coating method and particle coating apparatus
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Application No.: US16802937Application Date: 2020-02-27
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Publication No.: US11220749B2Publication Date: 2022-01-11
- Inventor: Kenji Otsuka , Kazuhiro Gomi
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-035560 20190228
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455 ; C23C16/02 ; C23C16/44 ; C23C16/56

Abstract:
A particle coating method includes placing magnetic particles in a vessel, fixing the magnetic particles by a magnetic force caused by a magnetic field generated in the vessel, and forming a coating film on surfaces of the magnetic particles by an atomic layer deposition method. Further, the method preferably includes forming a coating film on surfaces of the magnetic particles by an atomic layer deposition method in a state where the magnetic particles are fixed by the magnetic force in a first direction, thereby obtaining coated magnetic particles, and forming a coating film on surfaces of the coated magnetic particles in a state where the coated magnetic particles are fixed by the magnetic force in a second direction different from the first direction.
Public/Granted literature
- US20200277701A1 PARTICLE COATING METHOD AND PARTICLE COATING APPARATUS Public/Granted day:2020-09-03
Information query
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