Invention Grant
- Patent Title: Microelectromechanical force sensor having a strain transfer layer arranged on the sensor die
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Application No.: US16632795Application Date: 2018-07-19
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Publication No.: US11221263B2Publication Date: 2022-01-11
- Inventor: Julius Minglin Tsai , Dan Benjamin
- Applicant: NEXTINPUT, INC.
- Applicant Address: US CA Mountain View
- Assignee: NEXTINPUT, INC.
- Current Assignee: NEXTINPUT, INC.
- Current Assignee Address: US CA Mountain View
- Agency: Meunier Carlin & Curfman LLC
- International Application: PCT/US2018/042883 WO 20180719
- International Announcement: WO2019/018641 WO 20190124
- Main IPC: G01L1/22
- IPC: G01L1/22 ; H01L41/053 ; H01L41/113 ; G01L1/16 ; B81B3/00 ; B81B7/00 ; G01L1/18

Abstract:
Described herein is a ruggedized microelectromechanical (“MEMS”) force sensor including a sensor die and a strain transfer layer. The MEMS force sensor employs piezoresistive or piezoelectric strain gauges for strain sensing where the strain is transferred through the strain transfer layer, which is disposed on the top or bottom side of the sensor die. In the case of the top side strain transfer layer, the MEMS force sensor includes mechanical anchors. In the case of the bottom side strain transfer layer, the protection layer is added on the top side of the sensor die for bond wire protection.
Public/Granted literature
- US20200149983A1 STRAIN TRANSFER STACKING IN A MEMS FORCE SENSOR Public/Granted day:2020-05-14
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