Invention Grant
- Patent Title: Charged particle beam apparatus and machine learning method
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Application No.: US16415514Application Date: 2019-05-17
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Publication No.: US11222241B2Publication Date: 2022-01-11
- Inventor: Fuminori Uematsu
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JPJP2018-100932 20180525
- Main IPC: G06K9/62
- IPC: G06K9/62 ; G06N20/00 ; H01J37/22 ; H01J37/28

Abstract:
An image conversion unit includes a selector and a plurality of image converters. Each image converter is formed from an estimator of machine learning type, and estimates, based on an image acquired under a first observation condition and as a reference image, an image which is presumed to be acquired under a second observation condition. When a particular reference image is selected from among a plurality of reference images displayed on a display, a second observation condition corresponding to the selected reference image is set in an observation mechanism as a next observation condition.
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