公开(公告)号：US20230026970A1

公开(公告)日：2023-01-26

申请号：US17869117

申请日：2022-07-20

Applicant: JEOL Ltd.

Inventor： Keito Aibara ,  Tomohiro Nakamichi ,  Shigeyuki Morishita ,  Motofumi Saito ,  Ryusuke Sagawa ,  Fuminori Uematsu

IPC: H01J37/153 ,  H01J37/244 ,  H01J37/28

Abstract: Prior to execution of primary correction, a first centering process, an in-advance correction of a particular aberration, and a second centering process are executed stepwise. In the first centering process and the second centering process, a ronchigram center is identified based on a ronchigram variation image, and is matched with an imaging center. In the in-advance correction and the post correction of the particular aberration, a particular aberration value is estimated based on a ronchigram, and the particular aberration is corrected based on the particular aberration value.

公开(公告)号：US20210065849A1

公开(公告)日：2021-03-04

申请号：US17004229

申请日：2020-08-27

Applicant: JEOL Ltd.

Inventor： Fuminori Uematsu ,  Takaya Satoh ,  Masahiko Takei

IPC: G16C20/20 ,  H01J49/00

Abstract: A preprocessor extracts a plurality of spectra to be processed, from an overall mass spectrum. A simulated spectrum generator having a learned model generates a simulated spectrum having a peak discriminating action, from each mass spectrum. A postprocessor generates a combined simulated spectrum based on the plurality of simulated spectra. A peak filter executes peak discrimination on a peak list using the combined simulated spectrum.

公开(公告)号：US20220146442A1

公开(公告)日：2022-05-12

申请号：US17518612

申请日：2021-11-04

Applicant: JEOL Ltd.

Inventor： Takanori Murano ,  Fuminori Uematsu

IPC: G01N23/223 ,  G06N3/08

Abstract: In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

公开(公告)号：US11211150B2

公开(公告)日：2021-12-28

申请号：US17004229

申请日：2020-08-27

Applicant: JEOL Ltd.

Inventor： Fuminori Uematsu ,  Takaya Satoh ,  Masahiko Takei

IPC: H01J49/00 ,  G16C20/20

Abstract: A preprocessor extracts a plurality of spectra to be processed, from an overall mass spectrum. A simulated spectrum generator having a learned model generates a simulated spectrum having a peak discriminating action, from each mass spectrum. A postprocessor generates a combined simulated spectrum based on the plurality of simulated spectra. A peak filter executes peak discrimination on a peak list using the combined simulated spectrum.

公开(公告)号：US11764029B2

公开(公告)日：2023-09-19

申请号：US17576016

申请日：2022-01-14

Applicant: JEOL Ltd.

Inventor： Shigeyuki Morishita ,  Ryusuke Sagawa ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/10 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/10 ,  H01J37/26 ,  H01J2237/1534

Abstract: A method of measuring an aberration in an electron microscope includes: acquiring an image for measuring the aberration in the electron microscope; and measuring the aberration by using the image. In measuring the aberration, a direction of defocusing is specified based on a residual aberration that is uniquely determined by a configuration of an optical system of the electron microscope and an optical condition of the optical system.

公开(公告)号：US20220230838A1

公开(公告)日：2022-07-21

申请号：US17576016

申请日：2022-01-14

Applicant: JEOL Ltd.

Inventor： Shigeyuki Morishita ,  Ryusuke Sagawa ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/10

Abstract: A method of measuring an aberration in an electron microscope includes: acquiring an image for measuring the aberration in the electron microscope; and measuring the aberration by using the image. In measuring the aberration, a direction of defocusing is specified based on a residual aberration that is uniquely determined by a configuration of an optical system of the electron microscope and an optical condition of the optical system.

公开(公告)号：US11842880B2

公开(公告)日：2023-12-12

申请号：US17671896

申请日：2022-02-15

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa ,  Shigeyuki Morishita ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1534 ,  H01J2237/2487 ,  H01J2237/2802

Abstract: An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.

公开(公告)号：US11788976B2

公开(公告)日：2023-10-17

申请号：US17518612

申请日：2021-11-04

Applicant: JEOL Ltd.

Inventor： Takanori Murano ,  Fuminori Uematsu

IPC: G01N23/2209 ,  G01N23/223 ,  G06N3/08

CPC classification number: G01N23/2209 ,  G01N23/223 ,  G06N3/08 ,  G01N2223/0563

Abstract: In a preliminary measurement, spectrums obtained by detecting characteristic X-rays emitted from preliminary measurement points are transmitted to a spectrum processing unit via a noise filter unit. In a main measurement, a spectrum obtained by detecting characteristic X-rays emitted from a main measurement point is transmitted to the spectrum processing unit by bypassing the noise filter unit. The noise filter unit includes a machine learning type filter constituted of a CNN or the like. In a learning process, teacher data are generated using artificially-generated noise.

公开(公告)号：US20220262595A1

公开(公告)日：2022-08-18

申请号：US17671896

申请日：2022-02-15

Applicant: JEOL Ltd.

Inventor： Ryusuke Sagawa ,  Shigeyuki Morishita ,  Fuminori Uematsu ,  Tomohiro Nakamichi ,  Keito Aibara

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/26

Abstract: An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.

公开(公告)号：US11222241B2

公开(公告)日：2022-01-11

申请号：US16415514

申请日：2019-05-17

Applicant: JEOL Ltd.

Inventor： Fuminori Uematsu

IPC: G06K9/62 ,  G06N20/00 ,  H01J37/22 ,  H01J37/28

Abstract: An image conversion unit includes a selector and a plurality of image converters. Each image converter is formed from an estimator of machine learning type, and estimates, based on an image acquired under a first observation condition and as a reference image, an image which is presumed to be acquired under a second observation condition. When a particular reference image is selected from among a plurality of reference images displayed on a display, a second observation condition corresponding to the selected reference image is set in an observation mechanism as a next observation condition.