Invention Grant
- Patent Title: Thin film transistor, method for fabricating the same, display substrate, and display device
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Application No.: US16077777Application Date: 2017-12-13
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Publication No.: US11227882B2Publication Date: 2022-01-18
- Inventor: Xiaolong Li , Dong Li , Huijuan Zhang , Zheng Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- International Application: PCT/CN2017/115887 WO 20171213
- International Announcement: WO2018/145515 WO 20180816
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L29/786 ; H01L51/52

Abstract:
A thin film transistor, a method for fabricating the same, a display substrate, and a display device are disclosed. The thin film transistor includes a gate, a source, a drain, and an active layer. Forming the active layer includes: forming a pattern comprising a thermal insulation layer; forming a pattern comprising an amorphous silicon layer on the thermal insulation layer, wherein the pattern comprising the amorphous silicon layer includes a first portion on the thermal insulation layer and a second portion extending beyond the thermal insulation layer; and treating the pattern comprising the amorphous silicon layer with a laser annealing process, so that the amorphous silicon layer grows grain in a direction from the second portion to the first portion to form the active layer from polycrystalline silicon.
Public/Granted literature
- US20210193700A1 THIN FILM TRANSISTOR, METHOD FOR FABRICATING THE SAME, DISPLAY SUBSTRATE, AND DISPLAY DEVICE Public/Granted day:2021-06-24
Information query
IPC分类: