Invention Grant
- Patent Title: Optical measuring apparatus and optical measuring method
-
Application No.: US16764526Application Date: 2018-10-30
-
Publication No.: US11231272B2Publication Date: 2022-01-25
- Inventor: Takeshi Akagawa , Masahiro Kubo , Katsumi Abe , Ersin Altintas , Yuji Ohno , Tetsuri Ariyama , Ichiro Ishimaru
- Applicant: NEC CORPORATION , NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Applicant Address: JP Tokyo; JP Takamatsu
- Assignee: NEC CORPORATION,NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee: NEC CORPORATION,NATIONAL UNIVERSITY CORPORATION KAGAWA UNIVERSITY
- Current Assignee Address: JP Tokyo; JP Takamatsu
- Agency: Sughrue Mion, PLLC
- Priority: JPJP2017-220971 20171116
- International Application: PCT/JP2018/040225 WO 20181030
- International Announcement: WO2019/098005 WO 20190523
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/45

Abstract:
Optical measuring apparatus includes: a light source irradiating an object to be measured; a splitter splitting transmitted light or reflected light from the object to be measured; a phase changer changing a phase of a first light which is one of the lights split; a phase fixer maintaining a phase of a second light which is the other light split; a multiplexer multiplexing lights output from the phase changer and the phase fixer; a detector detecting the light (interference image) output from the multiplexer; and a controller that extracts a reference point from the interference image, when a displacement of the reference point is detected, corrects a luminance value for each pixel of the interference images in accordance with a displacement of the object to be measured indicated by a displacement of the reference point, constructs an interferogram based on the luminance value for each pixel of the interference images after the correction.
Public/Granted literature
- US20200333128A1 OPTICAL MEASURING APPARATUS AND OPTICAL MEASURING METHOD Public/Granted day:2020-10-22
Information query