Invention Grant
- Patent Title: Deposition system with shield mount
-
Application No.: US16444570Application Date: 2019-06-18
-
Publication No.: US11236415B2Publication Date: 2022-02-01
- Inventor: Vibhu Jindal , Sanjay Bhat
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C14/34 ; C23C14/14

Abstract:
A deposition system and a method of operation thereof are disclosed. A PVD chamber is disclosed comprising a plurality of cathode assemblies, a rotating shield below the plurality of cathode assemblies to expose one of the plurality cathode assemblies through the shroud and through a shield hole of the shield, the shield comprising a top surface including a raised peripheral frame. A shield mount sized and shaped to engage with the raised peripheral frame to secure the shield mount to the shield.
Public/Granted literature
- US20190382879A1 Deposition System With Shield Mount Public/Granted day:2019-12-19
Information query
IPC分类: